Laboratory_equipments

Spin coaters

Spin Coaters, model JS-401 series

Features

-Compact and cost effective performance spinner (spin coater) with multi function

-The best selling spinner (spincoater) with simple and easy operation

-Applicable upto Φ303.2mm (12 inch) substrates depending on model.

spin coater Models	JS-401-100	JS-401-150	JS-401-200	JS-401-300

substrate and wafer	less than 100Ømm	less than 150Ømm	less than 200Ømm	less than 300Ømm
bowl diameter, mm	Ø200	Ø300	Ø400	Ø600
body	SUS 304, polished	SUS 304, polished	SUS 304, polished	SUS 304, polished
Max. RPM	6,000	6,000	5,000	3,000
recipes stored	10 recipes, 10 steps	10 recipes, 10 steps	10 recipes, 10 steps	10 recipes, 10 steps
display	digital, LCD touch panel	digital, LCD touch panel	digital, LCD touch panel	digital, LCD touch panel
accuracy	± 1 RPM	± 1 RPM	± 1 RPM	± 1 RPM
vacuum, chuck	1 ea. included	1 ea. included	1 ea. included	1 ea. included
vacuum pump	included	included	included	included
power	AC220V, 4A	AC220V, 6A	AC220V, 8A	AC220V, 10A
dimension,WxDxHmm	320x340x225	380x410x225	450x490x300	700x750x600
bowl lid	transparent PVC	transparent PVC	transparent PVC	transparent PVC

	USD5,500.00	USD6,500.00	USD9,500.00	USD15,500.00

Option: Photoresist dispenser

ZR Instruments Catalog Table of Contents

postal Address: 24-307, Kookje U-tong Center, 555-9, Hogye-dong, Dongan-ku, Anyang-city, Kyunggi-do, Korea. zip)431-080
Phone) 82-31-479-1458/9 Fax)82-31-479-1457 E-mail) zepsales@naver.com