Welcome to Zeppelin Research Instruments Co.

     Zinst designs and manufactures spin coaters, dip coaters and vacuum tweezer set for R&D and manufacturing in sermiconductor industry. Zinst is a part of the Jaesung Engineering company,www.maskcleaners.com, the leading independent semiconductor equipments supplier to electronics and semiconductor industry.

Spin Coaters,  model JS-401 series

 

 

Features

 

 -Compact and cost effective performance spinner (spin coater) with multi function

 
-The best selling spinner (spincoater) with simple and easy operation

 

 -Applicable upto ¥Õ303.2mm (12 inch) substrates depending on model.

 

 

 

spin coater Models

JS-401-100

JS-401-150

JS-401-200

JS-401-300

 

    

       

substrate and wafer

less than 100Ømm

less than 150Ømm

less than 200Ømm

less than 300Ømm

bowl diameter, mm

Ø200

Ø300

Ø400

Ø600

body

SUS 304, polished

SUS 304, polished

SUS 304, polished

SUS 304, polished

RPM

6,000

6,000

5,000

3,000

recipes stored

10 recipes, 10 steps 

10 recipes, 10 steps 

10 recipes, 10 steps 

10 recipes, 10 steps 

display

digital, LCD

touch panel

digital, LCD

touch pane

digital, LCD

touch pane

digital, LCD

touch pane

accuracy

± 1 RPM

± 1 RPM

± 1 RPM

± 1 RPM

vacuum, chuck

1 ea. included

1 ea. included

1 ea. included

1 ea. included

vacuum pump

included

included

included

included

power

AC220V, 4A

AC220V, 6A

AC220V, 8A

AC220V, 10A

dimension,WxDxHmm

320x340x225

380x410x225

450x490x300

700x750x600

bowl lid

transparent PVC

transparent PVC

transparent PVC

transparent PVC

 

 

 

 

 

 

 USD5,500.00

USD6,500.00

 USD9,500.00

 USD15,500.00

Option: Photoresist dispenser

 

 

ZR Instruments Catalog Table of Contents

postal Address:  24-307, Kookje U-tong Center, 555-9, Hogye-dong, Dongan-ku, Anyang-city, Kyunggi-do, Korea.  zip)431-080
 Phone) 82-31-479-1458/9   Fax)82-31-479-1457     E-mail)  zepsales@naver.com